Company Name | Nikon Precision Inc |
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Website | https://www.nikonprecision.com |
Snippet | The inline Alignment Station (iAS) and LithoBooster. iAS is a high speed, pre-measurement module that can be integrated between the coater/developer and the NSR-S631E or S635E scanners. iAS provides feed forward alignment results for all shots on every wafer. iAS capabilities can be extended to other scanners with the LithoBooster Standalone Alignment Station. |
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